| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3993561-B2 |
| titleOfInvention |
Method and apparatus for monitoring wall film |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100963555-B1 |
| priorityDate |
2001-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |