http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3992993-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00 |
| filingDate | 2002-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3992993-B2 |
| titleOfInvention | Resist composition for positive electron beam, X-ray or EUV |
| priorityDate | 2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 460.