| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01G2013-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D2099-0026 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01G13-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D85-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B17-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D43-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D99-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J65-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D85-345 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J65-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27B17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F27D99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2004-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3972126-B2 |
| titleOfInvention |
Ultraviolet generation source, ultraviolet irradiation processing apparatus and semiconductor manufacturing apparatus |
| priorityDate |
2004-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |