http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3962414-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
filingDate | 2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2007-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3962414-B2 |
titleOfInvention | Wafer batch inspection apparatus and manufacturing method of inspection substrate used therefor |
priorityDate | 2004-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040 |
Total number of triples: 12.