http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3931963-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3931963-B2 |
| titleOfInvention | Solution raw material for metal organic chemical vapor deposition containing β-diketonate complex of copper (II) and method for producing copper thin film using the same |
| priorityDate | 2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 86.