| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20 |
| filingDate |
1998-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3924952-B2 |
| titleOfInvention |
Polishing apparatus and polishing pad |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012141328-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012141327-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012141329-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9149905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013058183-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9011212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140035374-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140075795-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140035375-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9381612-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10065286-B2 |
| priorityDate |
1998-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |