http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3897908-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 1998-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3897908-B2 |
| titleOfInvention | Method for forming low dielectric constant insulating film, interlayer insulating film, and semiconductor device |
| priorityDate | 1998-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.