http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3874074-B2

Outgoing Links

Predicate Object
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 2001-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2007-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3874074-B2
titleOfInvention Pattern formation method
priorityDate 2000-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421133628
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54535402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414843955
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87449127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10908
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425154543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450280174
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54514079
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23036854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453080453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11001803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453766874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412217010
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6385
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414035579
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517952
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392898
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53742843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15333521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123325
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID308178
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466732815
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54514167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11056751
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414842790
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18232
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87867819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7802
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449385152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450873355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410573180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414779695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419646344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22646120
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID521169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452775643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426082814
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410490912
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420787456
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451615029
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8871
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1001
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518007
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454482646
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID147722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412798128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61373
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452878462
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87450836
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3767616
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410182425
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449020203
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521657
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21987716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450924351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419707310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6971205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453926470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450117315
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21094836
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430895435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451284736
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54149801
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2737137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448189731
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415841400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453369608
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421229520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453431279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420223261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5354405
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161714113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410492264
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID97486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410437773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419707315
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53909804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447469655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408394019
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18916270
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872619
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87450090
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450927507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422094432
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21094842
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414843956
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415801456
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419706947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54680871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414843953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430887837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410479698
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID97723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414875081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414843954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422089649
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104448
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414843022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID466102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712472
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574217
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10933171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452585505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425829127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87601771
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11448035
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22290449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6558
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54353611
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61924
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410490365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139145
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24232
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87602651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512948
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53678576
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID72899
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31246
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53996759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87602557
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6582
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421275518
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538525
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12545759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452149703
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14454758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474448
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415933719
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6578
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12277
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16216936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414842688
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393625
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414842789
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454413994
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414803939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451507832
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6809
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410483175
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419563201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457574877
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421330885
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7681
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426001555

Total number of triples: 209.