http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3852868-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D129-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-00 |
filingDate | 1997-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3852868-B2 |
titleOfInvention | Antireflection film material composition and resist pattern forming method using the same |
priorityDate | 1997-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 449.