http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3847537-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate | 2000-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3847537-B2 |
| titleOfInvention | Wafer prober chuck top and ceramic substrate used for wafer prober chuck top |
| priorityDate | 1999-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.