http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3816759-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-28 |
| filingDate | 2001-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3816759-B2 |
| titleOfInvention | Film forming method and film forming apparatus |
| priorityDate | 2001-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.