http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3813865-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3813865-B2 |
| titleOfInvention | Polishing method and polishing apparatus |
| priorityDate | 2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.