http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3801195-B1
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02 |
filingDate | 2006-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2006-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3801195-B1 |
titleOfInvention | Circuit device inspection electrode device, manufacturing method thereof, and circuit device inspection device |
abstract | PROBLEM TO BE SOLVED: To provide a circuit device inspecting electrode device having a small contact pitch and having a sufficient insulating property, and having a small contact resistance, a manufacturing method thereof, a method for manufacturing the same, and an array pitch of electrodes to be inspected is small or the number of electrodes is small. To provide an inspection device for a circuit device, which can perform a predetermined electrical inspection on all the electrodes to be inspected with high accuracy even for many circuit devices. An electrode device includes an insulating substrate in which a plurality of wiring through-holes each penetrating in the thickness direction are formed at predetermined positions, and an electrode substrate integrally fixed in the wiring through-hole of the insulating substrate. A plurality of columnar support members having projecting portions protruding from the surface of the insulating substrate, and a plurality of connection electrodes provided with the back surface supported by the front end surface of the support member, the back surface being flat. In the state where one end is fixed so as to extend through the support member in the thickness direction, the one end surface includes a plurality of electric wires integrally connected to the back surface of the connection electrode. [Selection] Figure 6 |
priorityDate | 2004-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.