http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3796559-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1998-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3796559-B2 |
| titleOfInvention | Resist material and pattern forming method |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11611273-B2 |
| priorityDate | 1997-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 627.