patent/JP-3795811-B2

Predicate	Object
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
filingDate	2002-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2006-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-3795811-B2
titleOfInvention	Wet processing method, wet processing apparatus, semiconductor device manufacturing method, and active matrix display device manufacturing method
priorityDate	2002-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62687 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452260893

Total number of triples: 20.