http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3788429-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2003-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3788429-B2 |
| titleOfInvention | Resist pattern manufacturing method, printed wiring board manufacturing method, and lead frame manufacturing method |
| abstract | <P>PROBLEM TO BE SOLVED: To method for producing a resist pattern for a photosensitive element which can be laminated in a good yield because of a reduced number of air voids that occur and is excellent in laminating property, shelf stability and working property, and to provide a method for producing a printed circuit board or lead frame having the resist pattern. <P>SOLUTION: This photosensitive element has a supporting film (A), a photosensitive resin composition layer (B) and a protective film (C). In the surface roughness of the protective film (C), the Ra of a face kept in contact with the photosensitive resin composition layer (B) is ≤0.15 μm and the Rmax is ≤1.5 μm. The Ra of the face which does not come in contact with the photosensitive resin composition layer (B) is 0.1 to 0.8 μm, and the Rmax is 1 to 5 μm. The photosensitive element, wherein the number of fisheyes with a diameter 80 μm or longer included in the protective film (C) is ≤5/m<SP>2</SP>, is laminated on a substrate for forming a circuit in such a way that the photosensitive resin composition layer (B) adheres closely to the substrate and the element is imagewise irradiated with active light. An exposed part is photoset and an unexposed part is removed by development. <P>COPYRIGHT: (C)2003,JPO |
| priorityDate | 1999-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 186.