http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3785452-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-16 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2001-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2006-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3785452-B2 |
titleOfInvention | Interlayer insulating film containing aromatic polycarbosilane and semiconductor device using the same |
priorityDate | 2001-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.