http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3733209-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1997-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3733209-B2 |
| titleOfInvention | Exposure equipment |
| priorityDate | 1997-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.