http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3711909-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L85-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G79-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| filingDate | 2001-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3711909-B2 |
| titleOfInvention | Composition for forming tantalum oxide film and method for producing tantalum oxide film |
| priorityDate | 2001-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 235.