http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3710296-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-08 |
| filingDate | 1998-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3710296-B2 |
| titleOfInvention | Bulk supply equipment for semiconductor process gas |
| priorityDate | 1998-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.