http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3680556-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 1998-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3680556-B2 |
| titleOfInvention | Polishing method of GaAs wafer |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8133815-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1997587-A2 |
| priorityDate | 1998-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.