http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3632992-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10 |
| filingDate | 1994-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3632992-B2 |
| titleOfInvention | Photoresist solution supply method |
| priorityDate | 1994-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 87.