http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3587532-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-0075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 |
| filingDate | 1998-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3587532-B2 |
| titleOfInvention | Antistatic electronic / electric parts and substrate processing equipment used in clean rooms |
| priorityDate | 1997-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 99.