| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2315-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2002-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3534738-B2 |
| titleOfInvention |
Ceramic susceptor mounting structure, ceramic susceptor support structure, and ceramic susceptor support member |
| priorityDate |
2002-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |