http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3494081-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 |
| filingDate | 1999-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3494081-B2 |
| titleOfInvention | Method for manufacturing low-density film, low-density film, insulating film, and semiconductor device |
| priorityDate | 1999-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 723.