| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C213-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C217-08 |
| filingDate |
1998-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3490604-B2 |
| titleOfInvention |
Method for producing quaternary ammonium base type semiconductor surface treating agent |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112752746-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112752746-B |
| priorityDate |
1998-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |