http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3490317-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 1998-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3490317-B2 |
| titleOfInvention | Copper thin film formation by chemical vapor deposition |
| priorityDate | 1998-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.