http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3488498-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1993-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3488498-B2 |
| titleOfInvention | Method of forming metal thin film in semiconductor device |
| priorityDate | 1993-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.