| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2111-00844 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5353 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09G3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 |
| filingDate |
2000-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3445570-B2 |
| titleOfInvention |
Etching solution for indium tin oxide film and etching method |
| priorityDate |
2000-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |