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publicationDate 2003-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3433678-B2
titleOfInvention Antimony-doped silicon single crystal wafer and epitaxial silicon wafer, and methods for producing them
priorityDate 1998-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 21.