http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3426055-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03C7-413 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K23-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
filingDate | 1995-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2003-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2003-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3426055-B2 |
titleOfInvention | Developer for photoresist layer |
priorityDate | 1994-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.