| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-86823 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K11-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K11-087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K1-16 |
| filingDate |
1993-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3405466-B2 |
| titleOfInvention |
Fluid switching valve and semiconductor device manufacturing apparatus |
| priorityDate |
1992-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |