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publicationDate 2003-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3387528-B2
titleOfInvention Composition for etching copper or copper alloy and method for etching the same
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1500719-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7431861-B2
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Total number of triples: 38.