| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-00 |
| filingDate |
2000-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2002-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3339492-B2 |
| titleOfInvention |
Operation method of ion source and ion beam irradiation device |
| priorityDate |
2000-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |