| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02675
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02672 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
1999-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2002-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3331999-B2 |
| titleOfInvention |
Manufacturing method of semiconductor thin film |
| priorityDate |
1999-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |