http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3324898-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-04 |
filingDate | 1995-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2002-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2002-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3324898-B2 |
titleOfInvention | Manufacturing method of positive resist pattern |
priorityDate | 1995-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 156.