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filingDate 1993-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3294678-B2
titleOfInvention Regeneration method of copper etchant
priorityDate 1993-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 22.