Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-151 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
filingDate |
1996-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2002-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2002-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-3284056-B2 |
titleOfInvention |
Substrate processing apparatus and pattern forming method |
priorityDate |
1995-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |