http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3271378-B2

Outgoing Links

Predicate Object
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
filingDate 1993-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-3271378-B2
titleOfInvention Radiation-sensitive resin composition
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013087429-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9784316-B2
priorityDate 1993-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420781400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69955
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22670920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14519
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419586677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573488
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415719519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18668389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423473827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19428884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449124469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6582
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419594570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419587349
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420495660
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514890
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8572
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11335
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422252590
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420223261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863661
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID552631
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422084548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6998
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12545759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412798128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420257977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547681
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544706
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413550325
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416007562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54290904
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2733956
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15868814
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420649539
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14876011
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13725648
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426656723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420874711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9007
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447766622
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70164
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69348
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21896293
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509494
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419507875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53685781
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5460631
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420316113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411653627
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426094555
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18916270
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420658400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8914
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12753
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419532444
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6544
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538638
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11295
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419475675
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426059834
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415970765
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12184
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545706
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6997
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID40399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420617148
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453453171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422035561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588590
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744642
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559593
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10383
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419551524
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3593277
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513954
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422065153
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521186
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410481566
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414779695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414856134
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453375181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408747011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7381
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582870
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412722157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410481094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415991924
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419818136
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5151203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522880
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21960798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415736852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10176137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10436
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415724026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872666
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415810261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5314498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10873
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID919792
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424559992
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54364013
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420208404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521077
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414206502
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420915880
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12059
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549379
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423500988
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11450
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31254
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10364
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7668
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID460
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416102067
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID458192
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70507
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426727572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422088833
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421185142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414886706
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33660
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121805
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17204
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420659001
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10696
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410437773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID359
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421832575
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409354136
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413709057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406907632
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12580
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8035
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20861
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422065356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7726
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61174
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451743945
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20177
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID305
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451466660
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408598123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521506
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424399109
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33659
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19371245
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422973363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33658
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5080429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449930772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419572244
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2749721
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10687
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7802
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421453152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415747868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94156
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID126
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70013225
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66737
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78828
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12101
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419532263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4740700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422151984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411460487
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421993795
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415742530
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10333
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422209161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419531440
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423398029
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484742
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421458550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54508332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID523918
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID196986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550815
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14009024
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53435303
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407514449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11101
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457169682
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416155203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15597504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411224273
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7249
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6937
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539539
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428202352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424468465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419541999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474343
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6943
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421836537

Total number of triples: 289.