http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3248489-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 1998-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3248489-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| priorityDate | 1998-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.