http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3215898-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 1992-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3215898-B2 |
| titleOfInvention | Plasma CVD method and plasma CVD apparatus |
| priorityDate | 1992-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.