| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2000-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3202979-B2 |
| titleOfInvention |
Resist composition and method for forming a patterned resist layer on a substrate |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7368220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8697329-B2 |
| priorityDate |
1999-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |