http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3198915-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2001-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2001-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3198915-B2 |
titleOfInvention | Chemically amplified positive resist material |
priorityDate | 1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 430.