| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate |
1996-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3177173-B2 |
| titleOfInvention |
Photosensitive polycyanurate photoresist and method for producing the same |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11143961-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016050215-A |
| priorityDate |
1995-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |