| Predicate |
Object |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-22 |
| filingDate |
1996-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3173368-B2 |
| titleOfInvention |
Polymer compound and chemically amplified positive resist material |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7410747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1566694-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1637927-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7504193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507174-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157208-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7851130-B2 |
| priorityDate |
1995-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |