http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3128554-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate | 1999-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3128554-B2 |
| titleOfInvention | Method for forming oxide optical thin film and apparatus for forming oxide optical thin film |
| priorityDate | 1999-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.