http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3119213-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-06 |
| filingDate | 1997-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3119213-B2 |
| titleOfInvention | Method and apparatus for analyzing impurities in a clean room atmosphere and on a semiconductor substrate surface |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7650959-B2 |
| priorityDate | 1997-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.