http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3095063-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 |
filingDate | 1997-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2000-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2000-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3095063-B2 |
titleOfInvention | Photomask manufacturing method |
priorityDate | 1997-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.