http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3063832-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8249 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06 |
| filingDate | 1997-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3063832-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| priorityDate | 1997-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID65781 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419480433 |
Total number of triples: 12.