http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3031316-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1997-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3031316-B2 |
| titleOfInvention | Exposure method |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11526082-B2 |
| priorityDate | 1997-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.